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LDR00343nas ac200157 k 4500
001000000297225
00520140820170810
007ta
008031226c 9999ulkar p 001ak0kor
022 ▼a 12258822
040 ▼a 247004
041 ▼a Eng
245 ▼a Journal of korean Vacuum Society.
260 ▼a 서울: ▼b 한국진공학회.
300 ▼b 삽화; ▼c 26cm.
980 ▼a