| LDR | | 02114nam u200397 4500 |
| 001 | | 000000418355 |
| 005 | | 20190215162809 |
| 008 | | 181129s2018 |||||||||||||||||c||eng d |
| 020 | |
▼a 9780438139947 |
| 035 | |
▼a (MiAaPQ)AAI10743460 |
| 035 | |
▼a (MiAaPQ)umd:18737 |
| 040 | |
▼a MiAaPQ
▼c MiAaPQ
▼d 247004 |
| 082 | 0 |
▼a 621 |
| 100 | 1 |
▼a Rauscher, Scott Gibson. |
| 245 | 10 |
▼a Force Sensing by Electrical Contact Resistance in SOI-DRIE MEMS. |
| 260 | |
▼a [S.l.]:
▼b University of Maryland, College Park.,
▼c 2018. |
| 260 | 1 |
▼a Ann Arbor:
▼b ProQuest Dissertations & Theses,
▼c 2018. |
| 300 | |
▼a 193 p. |
| 500 | |
▼a Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B. |
| 500 | |
▼a Advisers: Hugh Bruck |
| 502 | 1 |
▼a Thesis (Ph.D.)--University of Maryland, College Park, 2018. |
| 520 | |
▼a MEMS force sensors employ microfabricated elements to convert applied external forces to electrical signals, typically by piezoelectric, piezoresistive, or capacitive transduction. While existing force sensors based on these sensing principles h |
| 520 | |
▼a While several analytic models were combined to create an ECR-force model for predicting ECR-force sensitivity in systems containing differing contact geometry, topology, and electrical properties, experimental testing is the focal point of this |
| 520 | |
▼a The use of DRIE, as opposed to additive poly-Silicon-based fabrication, allows a tailorable force range through proof mass sizing and aspect ratio changes, adjustable pre-load through simple design, and integration of an ECR force sensor into ex |
| 590 | |
▼a School code: 0117. |
| 650 | 4 |
▼a Mechanical engineering. |
| 690 | |
▼a 0548 |
| 710 | 20 |
▼a University of Maryland, College Park.
▼b Mechanical Engineering. |
| 773 | 0 |
▼t Dissertation Abstracts International
▼g 79-11B(E). |
| 773 | |
▼t Dissertation Abstract International |
| 790 | |
▼a 0117 |
| 791 | |
▼a Ph.D. |
| 792 | |
▼a 2018 |
| 793 | |
▼a English |
| 856 | 40 |
▼u http://www.riss.kr/pdu/ddodLink.do?id=T14996813
▼n KERIS
▼z 이 자료의 원문은 한국교육학술정보원에서 제공합니다. |
| 980 | |
▼a 201812
▼f 2019 |
| 990 | |
▼a ***1012033 |