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020 ▼a 9780438036031
035 ▼a (MiAaPQ)AAI10749216
035 ▼a (MiAaPQ)upenngdas:13130
040 ▼a MiAaPQ ▼c MiAaPQ ▼d 247004
0820 ▼a 620.5
1001 ▼a Li, Yuan.
24510 ▼a Microlamination Based Lumped and Distributed Magnetic MEMS Systems Enabled by Through-Mold Sequential Multilayer Electrodeposition Technology.
260 ▼a [S.l.]: ▼b University of Pennsylvania., ▼c 2018.
260 1 ▼a Ann Arbor: ▼b ProQuest Dissertations & Theses, ▼c 2018.
300 ▼a 137 p.
500 ▼a Source: Dissertation Abstracts International, Volume: 79-10(E), Section: B.
500 ▼a Adviser: Mark G. Allen.
5021 ▼a Thesis (Ph.D.)--University of Pennsylvania, 2018.
520 ▼a Microfabricated magnetic MEMS components such as permanent micromagnets and soft magnetic structures are key enablers in various lumped and distributed systems such as energy harvesters, magnetometers, biomagnetic filters, and electromagnetic mi
520 ▼a (i) A lumped system of laminated permanent micromagnets. Microfabricated permanent magnets possessing a multilayer structure enabled by the Microlamination Technology that preserves the high energy density of thinner magnetic films, while simult
520 ▼a (ii) A distributed system of a bi-stable vertical magnetic actuator with non-contact latching. The utilization of the Microlamination Technology translates the structural periodicity (multilayer) into magnetic-field-pattern periodicity, which in
590 ▼a School code: 0175.
650 4 ▼a Nanotechnology.
650 4 ▼a Engineering.
690 ▼a 0652
690 ▼a 0537
71020 ▼a University of Pennsylvania. ▼b Electrical and Systems Engineering.
7730 ▼t Dissertation Abstracts International ▼g 79-10B(E).
773 ▼t Dissertation Abstract International
790 ▼a 0175
791 ▼a Ph.D.
792 ▼a 2018
793 ▼a English
85640 ▼u http://www.riss.kr/pdu/ddodLink.do?id=T14997034 ▼n KERIS ▼z 이 자료의 원문은 한국교육학술정보원에서 제공합니다.
980 ▼a 201812 ▼f 2019
990 ▼a ***1012033