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020 ▼a 9781085585200
035 ▼a (MiAaPQ)AAI13425972
040 ▼a MiAaPQ ▼c MiAaPQ ▼d 247004
0820 ▼a 620.5
1001 ▼a Wolf, Steven Michael.
24510 ▼a Applied Photochemistry for Multicolor Photolithography.
260 ▼a [S.l.]: ▼b University of Maryland, College Park., ▼c 2019.
260 1 ▼a Ann Arbor: ▼b ProQuest Dissertations & Theses, ▼c 2019.
300 ▼a 218 p.
500 ▼a Source: Dissertations Abstracts International, Volume: 81-02, Section: B.
500 ▼a Advisor: Falvey, Daniel E.
5021 ▼a Thesis (Ph.D.)--University of Maryland, College Park, 2019.
506 ▼a This item must not be sold to any third party vendors.
520 ▼a Photolithography is the most mature technique for nanomanufacturing. Traditional photolithography generates patterns using a single wavelength of light. Recently, there has been considerable interest in the development of new photoinitiators that can improve the patterning process by incorporating multiple wavelengths of light. This text will focus specifically on organic photoinitiators.Chapter 1 will begin with an introduction to organic photochemistry and the description of laser flash photolysis, a time-resolved UV-Vis spectroscopy technique used for characterizing short-lived intermediates formed as a result of photolysis. Then, it will provide a description of photolithography and explore the limitations of current techniques. Finally, it will describe multicolor photolithography and the characteristics of a multicolor photoinitiator.Chapters 2-4 will explore various organic compounds that have been investigated as potential multicolor photoinitiators. Chapter 2 will focus on the photodecomposition of 慣-diketones into radicals that can be used to initiate polymerization of sytrenic monomers. Laser flash photolysis, product analysis, and computational modeling will be used to demonstrate that this decomposition occurs through a Norrish type I mechanism where higher excited states are populated via triplet-triplet annihilation. Chapter 3 will explore dithioesters and trithiocarbonates that can be used as initiators for reversible addition-fragmentation chain transfer (RAFT) polymerization. Dithioesters and trithiocarbonates have a long history in the literature but their potential as photoinitiators has not been explored in depth. In chapter 3, computational modeling is used to investigate the excited states of various RAFT agents. Chapter 4 will focus on 2-methoxy-9,10-dioxo-9,10-dihydroanthracen-1-yl 4-methylbenzenesulfonate, a multicolor photoacid generator (PAG). When irradiated with 355 nm light, this PAG releases p-toluenesulfonic acid which can be used to initiate cationic polymerization. The addition of 532 nm light accelerates the acid release, making the PAG a two-color photoinitiator. Multicolor PAGs provide improved resolution over one-color systems which makes them useful for photolithography and nanomanufacturing.
590 ▼a School code: 0117.
650 4 ▼a Organic chemistry.
650 4 ▼a Nanotechnology.
690 ▼a 0490
690 ▼a 0652
71020 ▼a University of Maryland, College Park. ▼b Chemistry.
7730 ▼t Dissertations Abstracts International ▼g 81-02B.
773 ▼t Dissertation Abstract International
790 ▼a 0117
791 ▼a Ph.D.
792 ▼a 2019
793 ▼a English
85640 ▼u http://www.riss.kr/pdu/ddodLink.do?id=T15490435 ▼n KERIS ▼z 이 자료의 원문은 한국교육학술정보원에서 제공합니다.
980 ▼a 202002 ▼f 2020
990 ▼a ***1816162
991 ▼a E-BOOK