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020 ▼a 9798352979860
035 ▼a (MiAaPQ)AAI30003563
040 ▼a MiAaPQ ▼c MiAaPQ ▼d 247004
0820 ▼a 400
1001 ▼a Schneider, Joel Richard.
24510 ▼a Surface and Subsurface Reaction Mechanisms in Atomic Layer Deposition of Metals and Metal Oxides.
260 ▼a [S.l.]: ▼b Stanford University., ▼c 2022.
260 1 ▼a Ann Arbor: ▼b ProQuest Dissertations & Theses, ▼c 2022.
300 ▼a 539 p.
500 ▼a Source: Dissertations Abstracts International, Volume: 84-05, Section: B.
500 ▼a Advisor: Bent, Stacey.
5021 ▼a Thesis (Ph.D.)--Stanford University, 2022.
506 ▼a This item must not be sold to any third party vendors.
590 ▼a School code: 0212.
650 4 ▼a Language.
650 4 ▼a Teaching.
650 4 ▼a Reactors.
650 4 ▼a By products.
650 4 ▼a Surface chemistry.
650 4 ▼a Carbon.
650 4 ▼a Molybdenum.
650 4 ▼a Pandemics.
650 4 ▼a Microscopy.
650 4 ▼a Metal oxides.
650 4 ▼a Annotations.
650 4 ▼a Gas flow.
650 4 ▼a Geometry.
650 4 ▼a X-rays.
650 4 ▼a Chemistry.
650 4 ▼a Education.
650 4 ▼a Mathematics.
690 ▼a 0679
690 ▼a 0485
690 ▼a 0515
690 ▼a 0405
71020 ▼a Stanford University.
7730 ▼t Dissertations Abstracts International ▼g 84-05B.
773 ▼t Dissertation Abstract International
790 ▼a 0212
791 ▼a Ph.D.
792 ▼a 2022
793 ▼a English
85640 ▼u http://www.riss.kr/pdu/ddodLink.do?id=T16620955 ▼n KERIS ▼z 이 자료의 원문은 한국교육학술정보원에서 제공합니다.
980 ▼a 202302 ▼f 2023
990 ▼a ***1012033
991 ▼a E-BOOK