대구한의대학교 향산도서관

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1.
저널기사
Surface Cleaning and Etching of CdZnTe and CdTe in H~2/Ar, CH~4/H~2/Ar, and CH~4/H~2/N~2/Ar Electron Cyclotron Resonance Plasams: / Keller, R. C.;Zimmermann, H.;Seelmann-Eggebert, M.; / Institute of Electrical and Electronics Engineers / Journal of Electronic Materials / 1997 /