대구한의대학교 향산도서관

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검색간략리스트

1.
저널기사
Comparison of Dry Etching of III-V Semiconductors in ICl/Ar and IBr/Ar Electron Cyclotron Resonance Plasmas: / Lee, J. W.;Hong, J.;Lambers, E. S.; / Institute of Electrical and Electronics Engineers / Journal of Electronic Materials / 1997 /