대구한의대학교 향산도서관

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검색간략리스트

1.
저널기사
Improvement of the Crystallinity of 3C-SiC Films by Lowering the Electron Temperatures in the Afterglow Plasma Region Using Triode Plasma CVD: / Yasui, K.;Ninagawa, N.;Akahane, T.; / Institute of Electrical and Electronics Engineers / Journal of Electronic Materials / 1997 /