대구한의대학교 향산도서관

바구니

검색간략리스트

1.
저널기사
A study on the reactive ion etching of SiC single crystals using inductively coupled plasma of SF6-based gas mixtures: / 안S.C. 한S.Y. 이J.L. 문J.H. 이B.T. / The Korean Institute of Metals and Materials / Metals and Materials international / 2004 /