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Multiscale Computational Fluid Dynamics Modeling: Parallelization and Application to Design and Control of Plasma-Enhanced Chemical Vapor Deposition of Thin Film Solar Cells

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서명/저자사항Multiscale Computational Fluid Dynamics Modeling: Parallelization and Application to Design and Control of Plasma-Enhanced Chemical Vapor Deposition of Thin Film Solar Cells.
개인저자Crose, Marquis Grant.
단체저자명University of California, Los Angeles. Chemical Engineering.
발행사항[S.l.]: University of California, Los Angeles., 2018.
발행사항Ann Arbor: ProQuest Dissertations & Theses, 2018.
형태사항195 p.
기본자료 저록Dissertation Abstracts International 79-11B(E).
Dissertation Abstract International
ISBN9780438078048
학위논문주기Thesis (Ph.D.)--University of California, Los Angeles, 2018.
일반주기 Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B.
Adviser: Panagiotis D. Christofides.
요약Today, plasma-enhanced chemical vapor deposition (PECVD) remains the dominant processing method for the manufacture of silicon thin films due to inexpensive production and low operating temperatures. Nonetheless, thickness non-uniformity continu
요약Motivated by these considerations, novel reactor modeling and operational control strategies are developed in this dissertation. Specifically, a macroscopic reactor scale model is presented which captures the creation of a radio frequency (RF) p
일반주제명Chemical engineering.
Computational chemistry.
Computational physics.
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