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Process Characterization and Optimization of Roll-to-roll Plasma Chemical Vapor Deposition for Graphene Growth
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| 자료유형 | 학위논문 |
|---|---|
| 서명/저자사항 | Process Characterization and Optimization of Roll-to-roll Plasma Chemical Vapor Deposition for Graphene Growth. |
| 개인저자 | Alrefae, Majed A. |
| 단체저자명 | Purdue University. Mechanical Engineering. |
| 발행사항 | [S.l.]: Purdue University., 2018. |
| 발행사항 | Ann Arbor: ProQuest Dissertations & Theses, 2018. |
| 형태사항 | 174 p. |
| 기본자료 저록 | Dissertation Abstracts International 79-10B(E). Dissertation Abstract International |
| ISBN | 9780438010291 |
| 학위논문주기 | Thesis (Ph.D.)--Purdue University, 2018. |
| 일반주기 |
Source: Dissertation Abstracts International, Volume: 79-10(E), Section: B.
Advisers: Timothy S. Fisher |
| 요약 | The main purpose of this thesis is to develop an efficient and scalable technique for depositing graphene on various flexible substrates. Hence, a custom-built roll-to-roll capacitively coupled plasma chemical vapor system for deposition of grap |
| 요약 | Plasma plays a crucial role in heating the foil for graphene deposition in the roll-to-roll process, without the need of a supplemental heating source. Thus, accurate measurement of the translational gas temperature in the plasma is vital, since |
| 요약 | Graphene quality significantly depends on gas pressure since our plasma roll-to-roll system is sustained by a capacitively coupled plasma that operates in two modes, depending on the gas pressure and discharge gap. The modes are identified as al |
| 요약 | As a results of these plasma characterization tools, we report a continuous and rapid roll-to-roll deposition of thin graphite film on Cu foil. The composition of the Ar/H2/CH4/N2/O2 plasma plays significant role in the successful direct growth |
| 일반주제명 | Mechanical engineering. Nanotechnology. Materials science. |
| 언어 | 영어 |
| 바로가기 | 
: 이 자료의 원문은 한국교육학술정보원에서 제공합니다. |
