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Algorithms and Architectures for some Problems in Multibeam Electron Beam Lithography and SEM Metrology
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| 자료유형 | 학위논문 |
|---|---|
| 서명/저자사항 | Algorithms and Architectures for some Problems in Multibeam Electron Beam Lithography and SEM Metrology. |
| 개인저자 | Chaudhary, Narendra. |
| 단체저자명 | Texas A&M University. Electrical and Computer Engineering. |
| 발행사항 | [S.l.]: Texas A&M University., 2019. |
| 발행사항 | Ann Arbor: ProQuest Dissertations & Theses, 2019. |
| 형태사항 | 124 p. |
| 기본자료 저록 | Dissertations Abstracts International 83-12B. Dissertation Abstract International |
| ISBN | 9798438759805 |
| 학위논문주기 | Thesis (Ph.D.)--Texas A&M University, 2019. |
| 일반주기 |
Source: Dissertations Abstracts International, Volume: 83-12, Section: B.
Advisor: Savari, Serap A. |
| 이용제한사항 | This item must not be sold to any third party vendors. |
| 일반주제명 | Electrical engineering. Computer science. Artificial intelligence. Information science. |
| 언어 | 영어 |
| 바로가기 | 
: 이 자료의 원문은 한국교육학술정보원에서 제공합니다. |
