대구한의대학교 향산도서관

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SPECIAL ISSUE PAPERS ON III-V NITRIDES AND SILICON CARBIDE - Ohmic Contact Formation on Inductively Coupled Plasma Etched 4H-Silicon Carbide: / Lee, S-K ;Koo, S-M ;Zetterling, C-M ; / Institute of Electrical and Electronics Engineers / Journal of Electronic Materials / 2002 /
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