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Force Sensing by Electrical Contact Resistance in SOI-DRIE MEMS
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| 자료유형 | 학위논문 |
|---|---|
| 서명/저자사항 | Force Sensing by Electrical Contact Resistance in SOI-DRIE MEMS. |
| 개인저자 | Rauscher, Scott Gibson. |
| 단체저자명 | University of Maryland, College Park. Mechanical Engineering. |
| 발행사항 | [S.l.]: University of Maryland, College Park., 2018. |
| 발행사항 | Ann Arbor: ProQuest Dissertations & Theses, 2018. |
| 형태사항 | 193 p. |
| 기본자료 저록 | Dissertation Abstracts International 79-11B(E). Dissertation Abstract International |
| ISBN | 9780438139947 |
| 학위논문주기 | Thesis (Ph.D.)--University of Maryland, College Park, 2018. |
| 일반주기 |
Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B.
Advisers: Hugh Bruck |
| 요약 | MEMS force sensors employ microfabricated elements to convert applied external forces to electrical signals, typically by piezoelectric, piezoresistive, or capacitive transduction. While existing force sensors based on these sensing principles h |
| 요약 | While several analytic models were combined to create an ECR-force model for predicting ECR-force sensitivity in systems containing differing contact geometry, topology, and electrical properties, experimental testing is the focal point of this |
| 요약 | The use of DRIE, as opposed to additive poly-Silicon-based fabrication, allows a tailorable force range through proof mass sizing and aspect ratio changes, adjustable pre-load through simple design, and integration of an ECR force sensor into ex |
| 일반주제명 | Mechanical engineering. |
| 언어 | 영어 |
| 바로가기 | 
: 이 자료의 원문은 한국교육학술정보원에서 제공합니다. |
