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Microlamination Based Lumped and Distributed Magnetic MEMS Systems Enabled by Through-Mold Sequential Multilayer Electrodeposition Technology

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서명/저자사항Microlamination Based Lumped and Distributed Magnetic MEMS Systems Enabled by Through-Mold Sequential Multilayer Electrodeposition Technology.
개인저자Li, Yuan.
단체저자명University of Pennsylvania. Electrical and Systems Engineering.
발행사항[S.l.]: University of Pennsylvania., 2018.
발행사항Ann Arbor: ProQuest Dissertations & Theses, 2018.
형태사항137 p.
기본자료 저록Dissertation Abstracts International 79-10B(E).
Dissertation Abstract International
ISBN9780438036031
학위논문주기Thesis (Ph.D.)--University of Pennsylvania, 2018.
일반주기 Source: Dissertation Abstracts International, Volume: 79-10(E), Section: B.
Adviser: Mark G. Allen.
요약Microfabricated magnetic MEMS components such as permanent micromagnets and soft magnetic structures are key enablers in various lumped and distributed systems such as energy harvesters, magnetometers, biomagnetic filters, and electromagnetic mi
요약(i) A lumped system of laminated permanent micromagnets. Microfabricated permanent magnets possessing a multilayer structure enabled by the Microlamination Technology that preserves the high energy density of thinner magnetic films, while simult
요약(ii) A distributed system of a bi-stable vertical magnetic actuator with non-contact latching. The utilization of the Microlamination Technology translates the structural periodicity (multilayer) into magnetic-field-pattern periodicity, which in
일반주제명Nanotechnology.
Engineering.
언어영어
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