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Flexible Polymer Mold and UV-Curable Materials for Nanoimprint and Advanced Nanofabrication
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| 자료유형 | 학위논문 |
|---|---|
| 서명/저자사항 | Flexible Polymer Mold and UV-Curable Materials for Nanoimprint and Advanced Nanofabrication. |
| 개인저자 | Zhang, Qi. |
| 단체저자명 | Princeton University. Electrical Engineering. |
| 발행사항 | [S.l.]: Princeton University., 2018. |
| 발행사항 | Ann Arbor: ProQuest Dissertations & Theses, 2018. |
| 형태사항 | 179 p. |
| 기본자료 저록 | Dissertation Abstracts International 79-10B(E). Dissertation Abstract International |
| ISBN | 9780438047785 |
| 학위논문주기 | Thesis (Ph.D.)--Princeton University, 2018. |
| 일반주기 |
Source: Dissertation Abstracts International, Volume: 79-10(E), Section: B.
Adviser: Stephen Chou. |
| 요약 | As an emerging nanofabrication technique, nanoimprint lithography (NIL) has inspired and realized tremendous inventions of high-performance electronic, photonic, biological and nanodevices. However, challenges are still present in order to embra |
| 요약 | This work contributes several unique solutions: (1) By manipulating post-imprint Cr etching mask transfer (e.g., inversion, transformation and multiplication) with multi-layer material stack, shadowed film deposition and consecutive imprints, la |
| 일반주제명 | Nanotechnology. |
| 언어 | 영어 |
| 바로가기 | 
: 이 자료의 원문은 한국교육학술정보원에서 제공합니다. |
